Axcelis Tech Inc Contracts & Agreements

153 Contracts & Agreements
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Filed
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended and Restated May 7, 2025)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (as of February 15, 2025)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Schedule (Effective July 1, 2024)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (February 15, 2024)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2024
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (as of February 15, 2024)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2024
Axcelis Technologies, Inc. Executive Compensation Clawback Policy (August 2023)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2024
Employment Agreement between Axcelis Technologies, Inc. and Russell J. Low, Ph.D.
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2023
2023 Amended and Restated Employment Agreement between Axcelis Technologies, Inc. and Mary G. Puma
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2023
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (February 15, 2023)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2023
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (as of February 15, 2023)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2023
Axcelis Technologies Inc. Executive Compensation Clawback Policy
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2023
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2022
2022 Amended and Restated Employment Agreement between Axcelis Technologies, Inc. and Mary G. Puma
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2022
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (February 25, 2022)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2022
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (as of February 25, 2022)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2022
First Amendment to Amended and Restated Revolving Credit and Term Loan and Security Agreement by and among Axcelis Technologies, Inc., Silicon Valley Bank, and Lenders
Credit Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2021
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (February 26, 2021)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2021
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (as of February 26, 2021)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2021
Axcelis Technologies, Inc. Description of Common Stock Registered under Section 12 of the Exchange Act
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2020
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 2, 2020)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2020
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (as of March 2, 2020)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2020
Amended and Restated Executive Separation Pay Agreement between Axcelis Technologies, Inc. and Executives
Severance Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2019
Axcelis Technologies Named Executive Officer Base Compensation Disclosure (March 2019)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2019
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (as of March 11, 2019)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2019
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended February 5, 2019)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2019
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 14, 2018)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2018
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 14, 2018)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2018
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2018
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended through May 16, 2017)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 14, 2017)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 14, 2017)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
Axcelis Technologies, Inc. Change in Control Severance Agreement with Executive
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2017
Axcelis Technologies, Inc. 2012 Equity Incentive Plan
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2016
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 4, 2016)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2016
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 4, 2016)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2016
Axcelis Technologies, Inc. 2012 Equity Incentive Plan
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Sixth Amendment to Real Estate Sale Agreement between Middleton Beverly Investors LLC and Axcelis Technologies, Inc.
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Axcelis Technologies, Inc. 2000 Stock Plan (as Amended)
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2015
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 11, 2015)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 11, 2015)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Axcelis Technologies, Inc. Executive Separation Pay Agreement (2015)
Severance Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2015
Second Amendment to Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc.
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Lease Agreement between Beverly Property Owner LLC and Axcelis Technologies, Inc. dated January 30, 2015
Lease Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Real Estate Sale Agreement between Axcelis Technologies, Inc. and Middleton Beverly Investors LLC (October 3, 2014)
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
Base Compensation Reduction Agreement between Axcelis Technologies, Inc. and Mary G. Puma (July 31, 2014)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2014
Amendment to Business Loan Agreement between Axcelis Technologies, Inc. and Northern Bank & Trust Company (August 2014)
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
Waiver and First Amendment to Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc.
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2014
Amendment and Waiver to Business Loan Agreement between Axcelis Technologies, Inc. and Northern Bank & Trust Company (May 2, 2014)
Waiver Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 1, 2014)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2014
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 1, 2014)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2014
Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc.
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
Business Loan Agreement between Axcelis Technologies, Inc. and Northern Bank & Trust Company dated July 5, 2013
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
Mortgage and Fixture Filing Agreement between Axcelis Technologies, Inc. and Northern Bank & Trust Company (July 5, 2013)
Mortgage Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
Executive Separation Agreement between Axcelis Technologies, Inc. and Jay Zager
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 1, 2013)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2013
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 14, 2012)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2013
Letter Agreement Regarding Deferral of Base Salary Increase for CEO Mary G. Puma – Axcelis Technologies, Inc.
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2013
Asset Purchase Agreement between Lam Research Corporation and Axcelis Technologies, Inc.
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2012
Transition Agreement between Lam Research Corporation and Axcelis Technologies, Inc. (December 3, 2012)
Transition Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2012
Third Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Axcelis Technologies, Inc. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate (Employee Grant)
Warrant Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Axcelis Technologies, Inc. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate for Non-Employee Directors
Warrant Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Axcelis Technologies, Inc. Restricted Stock Unit Award Agreement under 2012 Equity Incentive Plan
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2012
Axcelis Technologies, Inc. Change of Control Agreement with Executive
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Second Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Amended and Restated Indemnification Agreement between Axcelis Technologies, Inc. and Officer/Director
Indemnification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2012
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (February 29, 2012)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (February 29, 2012)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Base Compensation Adjustment Agreement between Axcelis Technologies, Inc. and Mary G. Puma
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
First Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Executive Separation Agreement between Axcelis Technologies, Inc. and Matthew P. Flynn
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2012
Second Amended and Restated Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2011
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 14, 2011)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2011
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Disclosure (March 14, 2011)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2011
Executive Retirement Agreement between Axcelis Technologies, Inc. and Stephen G. Bassett
Retirement Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2011
First Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2010
Amended and Restated Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2010
Export-Import Bank Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2010
Axcelis Technologies, Inc. Management Incentive Plan (as Amended and Restated February 11, 2010)
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2010
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 15, 2010)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2010
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Disclosure (March 15, 2010)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2010
Modification Agreement for CEO Compensation between Axcelis Technologies, Inc. and Mary G. Puma
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
Mutual Intellectual Property License Agreement between Axcelis Technologies, Inc. and SEN Corporation (March 30, 2009)
License Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2009
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 1, 2009)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 1, 2009)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
Share Purchase Agreement among Sumitomo Heavy Industries, Ltd., Axcelis Technologies, Inc., and SEN Corporation (February 26, 2009)
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2009
Forbearance Agreement between U.S. Bank National Association and Axcelis Technologies, Inc. regarding 4.25% Convertible Senior Subordinated Notes
Forbearance Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2008
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 1, 2008)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2008
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 1, 2008)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2008
Executive Separation Agreement between Axcelis Technologies, Inc. and Mark J. Namaroff
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2008
Axcelis Technologies, Inc. and Marc S. Levine Executive Separation Agreement (August 22, 2007)
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2007
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (September 30, 2007)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2007
Amended and Restated Employment Agreement between Axcelis Technologies, Inc. and Mary G. Puma
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2007
Axcelis Technologies, Inc. Change of Control Agreement with Executive (2007)
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2007
Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 1, 2007)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2007
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Schedule (March 1, 2007)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2007
Indenture for 4.25% Convertible Senior Subordinated Notes Due 2009 between Axcelis Technologies, Inc. and U.S. Bank National Association
Indenture Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2006
Registration Rights Agreement between Axcelis Technologies, Inc. and Quantum Partners LDC (May 2, 2006)
Registration Rights Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2006
Axcelis Technologies, Inc. Executive Officer Cash Compensation and Change of Control Agreements (March 1, 2006)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2006
Axcelis Technologies, Inc. Non-Employee Director Compensation Policy (March 1, 2006)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2006
Axcelis Technologies, Inc. Employee Stock Purchase Plan (as Amended)
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies Executive Officer Stock Option Vesting Acceleration and Lock-Up Agreement
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Axcelis Technologies, Inc. Change of Control Agreement with Executive
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Executive Separation Agreement between Axcelis Technologies, Inc. and David W. Duff (July 1, 2005)
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2005
Axcelis Technologies, Inc. Non-Employee Director Compensation Policy (Effective July 1, 2005)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Axcelis Technologies, Inc. 2000 Stock Plan (as Amended)
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies, Inc. Restricted Stock Unit Award Agreement under 2000 Stock Plan
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies, Inc. Restricted Stock Agreement under 2000 Stock Plan with [Recipient Name]
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Axcelis Technologies, Inc. Employee Stock Purchase Plan (as amended January 2005)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies, Inc. Change of Control Agreement with Executive
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Axcelis Technologies, Inc. Employee Stock Purchase Plan (as Amended Effective July 1, 2005)
Subscription Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies, Inc. Executive Officer Cash Compensation Disclosure (March 1, 2005)
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Axcelis Technologies, Inc. Director Compensation Policy as of March 1, 2005
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Executive Separation Agreement between Axcelis Technologies, Inc. and Jan Paul van Maaren (2005)
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2005
Axcelis Technologies, Inc. Team Incentive Plan for Executive Officers
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2005
Axcelis Technologies, Inc. 2000 Non-Qualified Stock Option Certificate under 2000 Stock Plan
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2004
Axcelis Technologies, Inc. 2000 Stock Plan Non-Qualified Stock Option Certificate (Non-Employee Director Grant)
Warrant Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2004
Indenture Agreement for 4 1/4% Convertible Subordinated Notes Due 2007 between Axcelis Technologies, Inc. and State Street Bank and Trust Company
Indenture Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2002
Registration Rights Agreement among Axcelis Technologies, Inc. and Initial Purchasers (Morgan Stanley, Salomon Smith Barney, SG Cowen) dated January 15, 2002
Registration Rights Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2002
Master License Agreement between Eaton Corporation and Sumitomo Eaton Nova Kabushiki Kaisha (SEN)
License Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Axcelis Technologies, Inc. Common Stock Underwriting Agreement with Goldman Sachs, Morgan Stanley, Lehman Brothers, and Salomon Smith Barney
Underwriting Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Master Separation and Distribution Agreement between Eaton Corporation and Axcelis Technologies, Inc. dated June 30, 2000
Plan of Reorganization Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
General Assignment and Assumption Agreement between Eaton Corporation and Axcelis Technologies, Inc.
Assignment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Trademark License Agreement between Eaton Corporation and Axcelis Technologies, Inc.
Trademark Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Employee Matters Agreement between Eaton Corporation and Axcelis Technologies, Inc. dated June 30, 2000
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Tax Sharing and Indemnification Agreement between Eaton Corporation and Axcelis Technologies, Inc. (June 30, 2000)
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2000
Transitional Services Agreement between Eaton Corporation and Axcelis Technologies, Inc. dated June 30, 2000
Services Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Real Estate Matters Agreement between Eaton Corporation and Axcelis Technologies, Inc. dated June 30, 2000
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2000
Indemnification and Insurance Matters Agreement between Eaton Corporation and Axcelis Technologies, Inc. dated June 30, 2000
Indemnification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Rights Agreement between Axcelis Technologies, Inc. and Equiserve Trust Company, N.A. dated June 30, 2000
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2000
Employment Agreement between Axcelis Technologies, Inc. and Brian R. Bachman
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2000
Employment Agreement between Axcelis Technologies, Inc. and Mary G. Puma
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2000
Organization Agreement between Eaton Corporation and Sumitomo Heavy Industries, Ltd. for Formation of Sumitomo Eaton Nova Kabushiki Kaisha
Joint Venture Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Master License Agreement between Eaton Corporation and Sumitomo Eaton Nova Kabushiki Kaisha (SEN)
License Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Master Separation and Distribution Agreement between Eaton Corporation and Axcelis Technologies, Inc. (June 2000)
Plan of Reorganization Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Master Separation and Distribution Agreement between Eaton Corporation and Axcelis Technologies, Inc. (June 2000)
Plan of Reorganization Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Contribution and Assumption Agreement between Eaton Corporation and Axcelis Technologies
Contribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Trademark License Agreement between Eaton Corporation and Axcelis Technologies, Inc.
Trademark Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Employee Matters Agreement between Eaton Corporation and Axcelis Technologies, Inc. (June 2000)
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Transitional Services Agreement between Eaton Corporation and Axcelis Technologies, Inc. (June 2000)
Services Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Real Estate Matters Agreement between Eaton Corporation and Axcelis Technologies, Inc. (June 2000)
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2000
Purchase and Sale Agreement between Eaton Corporation and Eaton Semiconductor Equipment Inc.
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Axcelis Technologies, Inc. Specimen Common Stock Certificate
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Axcelis Technologies, Inc. and EquiServe Trust Company N.A. Rights Agreement (2000)
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2000
Axcelis Technologies, Inc. 2000 Stock Plan
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2000
Indemnification Agreement between Axcelis Technologies, Inc. and Indemnitee
Indemnification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2000
Axcelis Technologies, Inc. Change of Control Agreement with Executive (June 30, 2000)
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000
Organization Agreement for Formation of Sumitomo Eaton Nova Kabushiki Kaisha (SEN) between Eaton Corporation and Sumitomo Heavy Industries, Ltd.
Joint Venture Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
OH
2000
Master License Agreement between Eaton Corporation and Sumitomo Eaton Nova Kabushiki Kaisha (SEN)
License Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2000