Axcelis Tech Inc (9)

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Human Resources (8)
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Contracts

Non-Employee Director Cash Compensation at February 26, 2021 (Filed With SEC on February 26, 2021)
Description of Securities Registered under Section 12 of the Securities Exchange Act of 1934 (Filed With SEC on March 2, 2020)
Named Executive Officer Base Compensation at February 26, 2021 (Filed With SEC on February 26, 2021)
Named Executive Officer Base Compensation at March 02, 2020 (Filed With SEC on March 2, 2020)
NonEmployee Director Cash Compensation at March 02, 2020 (Filed With SEC on March 2, 2020)
Form of Amended and Restated Executive Separation Pay Agreement between the Company and each of Kevin J. Brewer, William Bintz, John E. Aldeborgh, Lynnette C. Fallon, Douglas A.... (Filed With SEC on August 7, 2019)
Named Executive Officer Base Compensation at March 11, 2019 (Filed With SEC on March 11, 2019)
NonEmployee Director Cash Compensation at March 11, 2019 (Filed With SEC on March 11, 2019)
Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 5, 2019 (Filed With SEC on March 11, 2019)