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Non-Employee Director Cash Compensation at February 25, 2022

Contract Categories: Human Resources - Compensation Agreements
EX-10.9 3 acls-20211231xex10d9.htm EX-10.9

Exhibit 10.9

Axcelis Technologies, Inc.

Non-Employee Director Cash Compensation at February 25, 2022

This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows:

Annual Cash Retainers, paid quarterly in advance

Board Member Retainer

$60,000

Independent Chairman Premium

$50,000

Committee Chair Retainers

Audit Committee Chairman

$25,000

Compensation Committee Chairman

$15,000

Nominating and Governance Committee Chairman

$10,000

Technology and Product Development Committee Chairman

$10,000

Committee Member (not Chairman) Retainers

Audit Committee Member

$10,000

Compensation Committee Member

$7,500

Nominating and Governance Committee Member

$5,000

Technology and Product Development Committee Member

$5,000

Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.

The Board of Directors may, from time to time, form committees in addition to the Audit, Compensation, Nominating and Governance and Technology and Product Development Committees and set compensation for service on such additional committees.