Non-Employee Director Cash Compensation at February 26, 2021

Contract Categories: Human Resources - Compensation Agreements
EX-10.12 3 acls-20201231xex10d12.htm EX-10.12

Exhibit 10.12

Axcelis Technologies, Inc.

Non-Employee Director Cash Compensation at February 26, 2021

This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides both cash retainers to its non-employee directors, as follows:

Annual Cash Retainers, paid quarterly in advance

Board Member Retainer


Independent Chairman Premium


Committee Chair Retainers

Audit Committee Chairman


Compensation Committee Chairman


Nominating and Governance Committee Chairman


Technology and Product Development Committee Chairman


Committee Member (not Chairman) Retainers

Audit Committee Member


Compensation Committee Member


Nominating and Governance Committee Member


Technology and Product Development Committee Member


Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.

The Board of Directors may, from time to time, form committees in addition to the Audit, Compensation, Nominating and Governance and Technology and Product Development Committees and set compensation for service on such additional committees.