Axcelis Tech Inc Contracts & Agreements

93 Contracts & Agreements
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Non-Employee Director Cash Compensation at February 15, 2025
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Named Executive Officer Base Compensation at February 15, 2025
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended by the Board of Directors on November 13, 2024
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Named Executive Officer Base Compensation at February 15, 2024
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2024
Non-Employee Director Cash Compensation at February 15, 2024
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2024
Executive Compensation Clawback Policy, as adopted by the Board of Directors on August 10, 2023
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2024
Employment Agreement between the Company and Russell J. Low dated May 11, 2023
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2023
Amended and Restated Employment Agreement between Axcelis Technologies, Inc. and Mary G. Puma dated as of February 24, 2023
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2023
Named Executive Officer Base Compensation at February 15, 2023
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2023
Non-Employee Director Cash Compensation at February 15, 2023
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2023
Executive Compensation Clawback Policy, as adopted by the Board of Directors on November 13, 2014
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2023
Axcelis Technologies, Inc. 2012 Equity Incentive Plan as Amended by Board of Directors August 2022
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2022
2022 Amended and Restated Employment Agreement between the Company and Mary G. Puma dated May 24, 2022
Employment Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2022
Named Executive Officer Base Compensation at February 25, 2022
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2022
Non-Employee Director Cash Compensation at February 25, 2022
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2022
First Amendment to Credit Agreement effective as of March 25, 2021, amending the Senior Secured Credit Facilities Credit Agreement dated as of July 31, 2020 among the Company, the...
Credit Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2021
Non-Employee Director Cash Compensation at February 26, 2021
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2021
Named Executive Officer Base Compensation at February 26, 2021
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2021
NonEmployee Director Cash Compensation at March 02, 2020
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2020
Named Executive Officer Base Compensation at March 02, 2020
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2020
Description of Securities Registered under Section 12 of the Securities Exchange Act of 1934
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2020
Form of Amended and Restated Executive Separation Pay Agreement between the Company and each of Kevin J. Brewer, William Bintz, John E. Aldeborgh, Lynnette C. Fallon, Douglas A....
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2019
NonEmployee Director Cash Compensation at March 11, 2019
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2019
Named Executive Officer Base Compensation at March 11, 2019
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2019
Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 5, 2019
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2019
Named Executive Officer Base Compensation at March 14, 2018
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2018
NonEmployee Director Cash Compensation at March 14, 2018
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2018
Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 13, 2018
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2018
AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for...
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
AXCELIS TECHNOLOGIES, INC. CHANGE IN CONTROL SEVERANCE AGREEMENT
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2017
Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 14, 2017
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
Axcelis Technologies, Inc. NonEmployee Director Cash Compensation at March 14, 2017
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Shareholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016, and as adjusted...
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Shareholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2016
AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Shareholders on May 2, 2012, May 14, 2013, May 13, 2014 and May 13, 2015
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
SECOND AMENDMENT TO LOAN AND SECURITY AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
LEASE AGREEMENT made as of the 30thday of January, 2015 by and between BEVERLY PROPERTY OWNER LLC as Landlord, and AXCELIS TECHNOLOGIES, INC. as Tenant
Lease Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at March 11, 2015
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION PAY AGREEMENT
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2015
SIXTH AMENDMENT TO REAL ESTATE SALE AGREEMENT
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
AXCELIS TECHNOLOGIES, INC. 2000 STOCK PLAN Adopted by the Board of Directors and Stockholders on June 9, 2000 Amended by the Board of Directors on October 25, 2000 and July 31,...
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2015
AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Shareholders on May 2, 2012, May 14, 2013, and May 13, 2014, and as further amended by the Board of...
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 11, 2015
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
REAL ESTATE SALE AGREEMENT by and between AXCELIS TECHNOLOGIES, INC., as the Seller and MIDDLETON BEVERLY INVESTORS LLC, as the Purchaser October 3, 2014
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
[Northern Bank & Trust Company letterhead] August 18, 2014
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
WAIVER AND FIRST AMENDMENT TO LOAN AND SECURITY AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2014
[Northern Bank & Trust Company Letterhead] May 2, 2014
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
LOAN AND SECURITY AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
BUSINESS LOAN AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
MORTGAGE AND FIXTURE FILING
Mortgage Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
ASSET PURCHASE AGREEMENT
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2012
TRANSITION AGREEMENT
Transition Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2012
THIRD LOAN MODIFICATION AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
AXCELIS TECHNOLOGIES, INC. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate Employee Grant Form
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
AXCELIS TECHNOLOGIES, INC. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate Non-Employee Director Grant Form
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
RESTRICTED STOCK UNIT AWARD AGREEMENT UNDER AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2012
CHANGE OF CONTROL AGREEMENT
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
SECOND LOAN MODIFICATION AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
FORM OF [AMENDED AND RESTATED](1) INDEMNIFICATION AGREEMENT
Indemnification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2012
Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 29, 2012
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
FIRST LOAN MODIFICATION AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 29, 2012
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2012
SECOND AMENDED AND RESTATED LOAN AND SECURITY AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2011
AXCELIS TECHNOLOGIES, INC. EXECUTIVE RETIREMENT AGREEMENT
Retirement Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2011
FIRST LOAN MODIFICATION AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2010
EXPORT-IMPORTBANK LOAN AND SECURITY AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2010
AMENDED ANDRESTATED LOAN AND SECURITY AGREEMENT
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2010
/s/ Mary G. Puma Mary G. Puma Chairman and Chief Executive Officer
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
LICENSE AGREEMENT
License Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2009
U.S. Bank NationalAssociation February 25,2009
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
SHARE PURCHASE AGREEMENT by and among SUMITOMO HEAVY INDUSTRIES, LTD., AXCELIS TECHNOLOGIES, INC. and SEN CORPORATION, AN SHI AND AXCELIS COMPANY Dated as of February 26, 2009
Share Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2009
LOANAND SECURITY AGREEMENT
Security Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2008
AxcelisTechnologies, Inc. Named Executive Officer Base Compensation at March 1, 2007
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2007
AxcelisTechnologies, Inc. Non-Employee Director Cash Compensation at March 1, 2007
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2007
REGISTRATIONRIGHTS AGREEMENT by andbetween AXCELISTECHNOLOGIES, INC., asIssuer, and QUANTUMPARTNERS LDC, asPurchaser Dated as of May 2, 2006
Registration Rights Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2006
AXCELIS TECHNOLOGIES, INC. To U.S. BANK NATIONAL ASSOCIATION, as Trustee INDENTURE Dated as of May 2, 2006 4% Convertible SeniorSubordinated Notes Due 2009
Indenture Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2006
Axcelis Technologies, Inc. Director Compensation atMarch 1, 2006
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2006
Axcelis Technologies, Inc. Executive Officer CashCompensation at March 1, 2006
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2006
AXCELIS TECHNOLOGIES, INC. EMPLOYEESTOCK PURCHASE PLAN
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
AxcelisTechnologies, Inc. 108 Cherry Hill Drive Beverly, MA 10915 October 26, 2005
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2005
CHANGEOF CONTROL AGREEMENT
Change of Control Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
AXCELIS TECHNOLOGIES, INC. RESTRICTED STOCK AGREEMENT [Recipient Name]
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
RESTRICTEDSTOCK UNIT AWARD AGREEMENT UNDER AXCELIS TECHNOLOGIES, INC. 2000 STOCK PLAN
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
AXCELISTECHNOLOGIES, INC. 2000 STOCK PLAN Adoptedby the Board of Directors and Stockholders on June 9, 2000 Amended by the Board of Directors on October 25, 2000 and July 31, 2001...
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies, Inc. Non-Employee Director Compensation effective July 1, 2005
Compensation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
AXCELIS TECHNOLOGIES, INC. EMPLOYEE STOCK PURCHASE PLAN
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
Separation Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2005
AXCELIS TECHNOLOGIES, INC. Axcelis Team Incentive Plan for Executive Officers Adopted by the Compensation Committee of the Board ofDirectors on January 26, 2005
Bonus & Incentive Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2005
AXCELIS TECHNOLOGIES, INC. 2000 Stock Plan Non-Qualified Stock OptionCertificate
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2004
AXCELIS TECHNOLOGIES, INC. 2000 Stock Plan Non-Qualified Stock OptionCertificate Non-EmployeeDirector Grant Form
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2004