Axcelis Technologies, Inc. Non-Employee Director Cash Compensation Policy (March 1, 2009)

Summary

This document outlines the cash compensation policy for non-employee directors of Axcelis Technologies, Inc. as of March 1, 2009. Non-employee directors receive annual retainers, additional fees for serving as committee chairs, and meeting fees for attending board and committee meetings. The policy also provides for reimbursement of out-of-pocket expenses related to meeting attendance. No other company-paid perks are provided. The agreement is between Axcelis Technologies, Inc. and its non-employee directors.

EX-10.10 3 a2191974zex-10_10.htm EXHIBIT 10.10
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Exhibit 10.10

Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at March 1, 2009

This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the "Company") and each of its non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows:

Annual Retainers (paid quarterly in advance)

Board Member Position	Amount
Lead Director	$	50,000
Non-Employee Board Member (not Lead Director)	$	30,000
Audit Committee Chair*	$	15,000
Compensation Committee Chair*	$	10,000
Nominating Committee Chair*	$	7,500

*: Retainers for Committee Chairs are in addition to the retainer payable to all non-employee Board members.

Meeting Fees (payable quarterly in arrears)

Meeting Type	Amount Per Meeting
In Person Board Meetings	$	2,000
Telephone Board Meetings	$	1,000
In Person or Telephone Committee Meetings**	$	1,000

**: Committee meeting fees are paid only to committee members, and not to other Board me members, attending committee meetings.

Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.

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