Axcelis Technologies, Inc. Named Executive Officer Base Compensation Disclosure (March 1, 2014)

Summary

This document outlines the base salaries for Axcelis Technologies, Inc.'s principal executive officer, principal financial officer, and three other top executive officers as of March 1, 2014. Only the CEO, Mary G. Puma, has a written employment agreement specifying a minimum base salary; other executives are employed at will and their salaries can be changed at the discretion of the Board's Compensation Committee. The document lists the annual base pay for each named executive officer.

EX-10.12 2 a2218577zex-10_12.htm EX-10.12
QuickLinks -- Click here to rapidly navigate through this document


Exhibit 10.12


Axcelis Technologies, Inc.
Named Executive Officer Base Compensation at March 1, 2014

        This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the "Company") and each of:

    the Company's principal executive officer (Mary G. Puma),

    the Company's principal financial officer (Kevin J. Brewer), and

    the three most highly compensated other executive officers serving as executive officers at December 31, 2013.

        These executive officers are referred to herein as "named executive officers" or "NEOs."

        Other than in the case of Mary G. Puma, the Company has not entered into any written agreements with its named executive officers addressing the amount of base salary due to the executive. The Company's Amended and Restated Employment Agreement with Ms. Puma ("Puma Employment Agreement") is listed as an Exhibit to this Form 10-K (incorporated by reference to Exhibit 10.3 to the Company's Form 10-Q for the quarter ended September 30, 2007 filed on November 8, 2007). The Company maintains that all executive officers, other than Ms. Puma, are employees at will and that the Company has no obligation to continue their employment, other in cases where such obligation arises under the Change of Control Agreements described in our Proxy Statement and filed as an Exhibit to this Form 10-K.

Rate of Base Pay

        In the course of the employment relationship with each NEO, the Company communicates to the named executive officer the amount of base salary approved by the Compensation Committee of the Board of Directors, which compensation is subject to change in the discretion of the Compensation Committee of the Board of Directors (provided Ms. Puma's employment agreement sets a minimum base pay amount). The following table sets forth the annual base salary as communicated to the named executive officers of the Company as in effect on March 1, 2014:

Named Executive Officer
  Title   Rate of Annual
Base Pay
 

Mary G. Puma

  President and Chief Executive Officer   $ 550,000  

Kevin J. Brewer

  Executive VP and Chief Financial Officer   $ 350,000  

William Bintz

  Executive VP, Engineering and Marketing   $ 330,000  

John E. Aldeborgh

  Executive VP, Global Customer Operations   $ 330,000  

Lynnette C. Fallon

  Executive VP HR/Legal and General Counsel   $ 320,000  



QuickLinks

    Exhibit 10.12
Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 1, 2014