Offer Letter, dated July 14, 2023, by and between the Company and Paul Ziegler

Base Salary: An annual salary in the amount of $600,000.00, payable in accordance with the Company’s standard payroll practices.

Performance Bonus: You will also be eligible (but not entitled) to receive a target performance bonus of 100% of the base salary, with a threshold of 50% and a maximum of 200% of the base salary. Actual incentive compensation may range from 0% - 200% of the target based on performance to goals. For the calendar year 2023, the performance bonus, if any, will be pro-rated based on your start date in this position.

Long-Term Equity Incentive: You will receive a restricted stock unit (RSU) grant of 1,200,000 shares under the terms and conditions set forth in a separate grant agreement and the Company’s 2015 Stock Incentive Plan, as amended (the “Plan”). During the periods of your full employment with the Company, the award will vest over a 2-year period. 50% of the award will vest 12 months after the grant date, and the final 50% will vest 24 months after the grant date. Your grant date will be July 15, 2023, or the following business day.

Long-Term Cash Incentive: Your target long-term cash incentive is $1,200,000.00 which will vest in full at 36 months. The actual amount payable will be determined based on the extent to which individual and company goals are achieved. The individual and company goals for

the Long-term cash incentive will be established through good faith collaboration between you and the Board of Directors.

The Confidential Severance Agreement, dated March 14, 2023, remains in force.

Effective January 1, 2024, you will move to a revised Severance Agreement which will include the following provisions:

Change in Control Severance Payment. In the event your employment is terminated due to a Qualifying Termination within the Covered Period related to a Change in Control (“Change in Control Event”), ViewRay agrees to make a lump sum severance payment to Employee in an amount equal to the sum of: (a) 200% of Employee’s base salary; (b) the Employee’s then current target annual bonus. The Change in Control Severance Payment shall be paid in lump sum on ViewRay’s first payroll period beginning after the Effective Date.

Non-Change in Control Severance Payment. In the event your employment is terminated and such termination is by ViewRay Without Cause or by Employee with Good Reason and such termination is not due to a Qualifying Termination within the Covered Period related to a Change in Control (a “Non-Change in Control Event”), ViewRay agrees to make a severance payment to Employee in an amount equal to: (a) 150% of Employee’s annual base salary (the “Base Salary Severance Payment”); and (b) the pro-rata portion of Employee’s Annual Incentive Plan (“AIP”) bonus for the current fiscal year of the Separation Date, based on the date of separation during such fiscal year (the “AIP Severance Payment”). The Base Salary Severance Payment shall be paid in lump sum on ViewRay’s first payroll period beginning after the Effective Date. The AIP Severance Payment shall be made in accordance with the payment schedule for that period’s AIP.