ELECTRONIC & TEST EQUIPMENT SCHEDULE SCHEDULE NO. 001
Exhibit 10.3
CONFIDENTIAL
ELECTRONIC & TEST EQUIPMENT SCHEDULE
SCHEDULE NO. 001
DATED THIS November 7, 2006
TO LEASE AGREEMENT
DATED AS OF November 7, 2006
Lessor & Mailing Address: | Lessee & Mailing Address: | |
General Electric Capital Corporation | Semiconductor Components Industries, LLC | |
4225 Executive Square Suite 800 | 5005 East McDowell Road, | |
La Jolla, CA 92037 | Attn: General Counsel | |
Phoenix, AZ 85008 |
This Schedule is executed pursuant to, and incorporates by reference the terms and conditions of, and capitalized terms not defined herein shall have the meanings assigned to them in, the Master Lease Agreement identified above (Agreement said Agreement and this Schedule being collectively referred to as Lease). This Schedule, incorporating by reference the Agreement, constitutes a separate instrument of lease.
A. Equipment: Subject to the terms and conditions of the Lease, Lessor agrees to Lease to Lessee the Equipment described below (the Equipment).
Number of Units | Capitalized Lessors Cost | Manufacturer | Serial Number | Model and Type of Equipment |
See Annex A attached hereto and made a part hereof, together with all other attachments, accessories, additions, replacements and substitutions now or hereafter attached thereto and made a part thereof.
Equipment Location: 23400 NE Glisan Street, Gresham, Multnomah County, Oregon, 97030
B. Financial Terms
1. | Advance Rent (if any): $985,292.15 |
2. | Capitalized Lessors Cost: $70,000,000.00 |
3. | Basic Term (No. of Months): 72 Months. |
4. | Basic Term Lease Rate Factor: 1.407560% |
5. | Lease Commencement Date: November 7, 2006 |
6. | Lessee Federal Tax ID No.: 36 ###-###-#### |
7. | Last Delivery Date: N/A |
8. | Daily Lease Rate Factor: .0469187% |
9. | First Termination Date: Twenty-four (24) months after the Lease Commencement Date. |
10. | Interim Rent: For the period from and including the Lease Commencement Date to but not including the Basic Term Commencement Date (Interim Period), Lessee shall pay as rent (Interim Rent) for each unit of Equipment, the product of the Daily Lease Rate Factor times the Capitalized Lessors Cost of such unit times the number of days in the Interim Period. Interim Rent shall be NOT APPLICABLE. |
11. | Basic Term Rent. Commencing on November 7, 2006 and on the same day of each month thereafter (each, a Rent Payment Date) during the Basic Term, Lessee shall pay as rent (Basic Term Rent) the product of the Basic Term Lease Rate Factor times the Capitalized Lessors Cost of all Equipment on this Schedule. Each payment of Basic Term Rent shall be allocated to and shall accrue for the use of the Equipment for the monthly period beginning on such Rent Payment Date. |
C. Tax Benefits Depreciation Deductions:
1. | Depreciation method is the 200 % declining balance method, switching to straight-line method for the 1st taxable year for which using the straight line method with respect to the adjusted basis as of the beginning of such year will yield a larger allowance. |
2. | Recovery Period: 5 years. |
3. | Basis: 100 % of the Capitalized Lessors Cost. |
4. | Gross Taxable Income: Only (A) Basic Rent in the amounts and no earlier than at the times such payments are accrued and (B) any gain realized by Lessor on the sale or other disposition of the Equipment at the time of such sale. |
CONFIDENTIAL
D. Property Tax
APPLICABLE TO EQUIPMENT LOCATED IN OREGON: Lessee agrees that it will not list any of such Equipment for property tax purposes or report any property tax assessed against such Equipment until otherwise directed in writing by Lessor. Upon receipt of any property tax bill pertaining to such Equipment from the appropriate taxing authority, Lessor will pay such tax and will invoice Lessee for the expense. Upon receipt of such invoice, Lessee will promptly reimburse Lessor for such expense.
Lessor may notify Lessee (and Lessee agrees to follow such notification) regarding any changes in property tax reporting and payment responsibilities.
E. Article 2A Notice
Intentionally Omitted
F. Stipulated Loss and Termination Value Table*
# of Base payments | Termination % of Cost | Stipulated Loss Value % of cost | # of Base payments | Termination % of Cost | Stipulated Loss Value % of cost | # of Base payments | Termination % of Cost | Stipulated Loss Value % of cost | ||||||||
1 | 107.472 | 25 | 79.494 | 83.488 | 49 | 51.332 | 55.329 | |||||||||
2 | 106.598 | 26 | 78.391 | 82.385 | 50 | 50.083 | 54.081 | |||||||||
3 | 105.696 | 27 | 77.280 | 81.274 | 51 | 48.829 | 52.827 | |||||||||
4 | 104.787 | 28 | 76.162 | 80.157 | 52 | 47.568 | 51.566 | |||||||||
5 | 103.871 | 29 | 75.038 | 79.032 | 53 | 46.299 | 50.297 | |||||||||
6 | 102.943 | 30 | 73.908 | 77.903 | 54 | 45.027 | 49.024 | |||||||||
7 | 102.004 | 31 | 72.773 | 76.768 | 55 | 43.750 | 47.748 | |||||||||
8 | 101.053 | 32 | 71.633 | 75.628 | 56 | 42.469 | 46.467 | |||||||||
9 | 100.091 | 33 | 70.487 | 74.482 | 57 | 41.184 | 45.183 | |||||||||
10 | 99.122 | 34 | 69.334 | 73.329 | 58 | 39.892 | 43.891 | |||||||||
11 | 98.141 | 35 | 68.176 | 72.171 | 59 | 38.596 | 42.595 | |||||||||
12 | 97.148 | 36 | 67.013 | 71.008 | 60 | 37.296 | 41.294 | |||||||||
13 | 96.148 | 37 | 65.842 | 69.838 | 61 | 36.988 | 39.987 | |||||||||
14 | 95.137 | 38 | 64.666 | 68.662 | 62 | 34.676 | 38.675 | |||||||||
15 | 94.115 | 39 | 63.485 | 67.481 | 63 | 33.359 | 37.359 | |||||||||
16 | 93.085 | 40 | 62.297 | 66.293 | 64 | 32.036 | 36.035 | |||||||||
17 | 92.049 | 41 | 61.101 | 65.098 | 65 | 30.705 | 34.704 | |||||||||
18 | 91.004 | 42 | 59.901 | 63.897 | 66 | 29.375 | 33.375 | |||||||||
19 | 89.953 | 43 | 58.694 | 62.691 | 67 | 28.047 | 32.047 | |||||||||
20 | 88.894 | 44 | 57.482 | 61.479 | 68 | 26.721 | 30.721 | |||||||||
21 | 87.827 | 45 | 56.265 | 60.262 | 69 | 25.397 | 29.396 | |||||||||
22 | 86.753 | 46 | 55.041 | 59.037 | 70 | 24.064 | 28.064 | |||||||||
23 | 85.672 | 47 | 53.810 | 57.807 | 71 | 22.734 | 26.734 | |||||||||
24 | 84.583 | 48 | 52.575 | 56.572 | 72 | 21.405 | 25.405 |
* | The Stipulated Loss Value or Termination Value for any unit of Equipment shall be the Capitalized Lessors Cost of such unit multiplied by the appropriate percentage derived from the above table. In the event that the Lease is for any reason extended, then the last percentage figure shown above shall control throughout any such extended term. |
CONFIDENTIAL
G. Modifications and Additions for This Schedule Only
For purposes of this Schedule only, the Agreement is amended as follows:
1. ACCEPTANCE
Pursuant to the provisions of the Lease, as it relates to this Schedule, Lessee hereby certifies and warrants that (i) all Equipment listed above is installed; (ii) Lessee has inspected the Equipment, and all such testing as it deems necessary has been performed by Lessee, Supplier or the manufacturer; and (iii) Lessee accepts the Equipment for all purposes of the Lease, the purchase documents and all attendant documents.
Lessee does further certify that as of the date hereof (i) Lessee is not in default under the Lease; (ii) the representations and warranties made by Lessee pursuant to or under the Lease are true and correct in all material respects on the date hereof and (iii) Lessee has reviewed and approves of the purchase documents for the Equipment, if any.
2. EQUIPMENT SPECIFIC PROVISIONS
Each reference contained in this Agreement to:
(a) Adverse Environmental Condition shall refer to, so long as the Equipment is in the control of Lessee, (i) the existence or the continuation of the existence, of an Environmental Emission (including, without limitation, a sudden or non-sudden accidental or non-accidental Environmental Emission), of, or exposure to, any substance, chemical, material, pollutant, Contaminant, odor or audible noise or other release or emission in, into or onto the environment (including, without limitation, the air, ground, water or any surface) at, in, by, from or related to any Equipment, (ii) the environmental aspect of the transportation, storage, treatment or disposal of materials in connection with the operation of any Equipment or (iii) the violation, or alleged violation of any statutes, ordinances, orders, rules regulations, permits or licenses of, by or from any governmental authority, agency or court relating to Environmental Law connected with any Equipment.
(b) Affiliate shall refer, with respect to any given Person, to any Person that directly or indirectly through one or more intermediaries, controls, or is controlled by, or is under common control with, such Person.
(c) Contaminant shall refer to those substances which are regulated by or form the basis of liability under any Environmental Law, including, without limitation, asbestos, polychlorinated biphenyls (PCBs), and radioactive substances, or other material or substance which has in the past or could in the future constitute a health, safety or environmental hazard to any Person, property or natural resources.
(d) Environmental Claim shall refer to any accusation, allegation, notice of violation, claim, demand, abatement or other order on direction (conditional or otherwise) by any governmental authority or any Person for personal injury (including sickness, disease or death), tangible or intangible property damage, damage to the environment or other adverse effects on the environment, or for fines, penalties or restrictions, resulting from or based upon any Adverse Environmental Condition.
(e) Environmental Emission shall refer to any actual or threatened release, spill, emission, leaking, pumping, injection, deposit, disposal, discharge, dispersal, leaching or migration into the indoor or outdoor environment, or into or out of any of the Equipment, including, without limitation, the movement of any Contaminant or other substance through or in the air, soil, surface water, groundwater or property.
(f) Environmental Law shall mean any federal, foreign, state or local law, rule or regulation pertaining to the protection of the environment, including, but not limited to, the Comprehensive Environmental Response, Compensation and Liability Act (CERCLA) (42 U.S.C. Section 9601 et seq.), the Hazardous Material Transportation Act (49 U.S.C. Section 1801 et seq .), the Federal Water Pollution Control Act (33 U.S.C. Section 1251 et seq .), the Resource Conservation and Recovery Act (42 U.S.C. Section 6901 et seq .), the Clean Air Act (42 U.S.C. Section 7401 et seq .), the Toxic Substances Control Act (15 U.S.C. Section 2601 et seq .), the Federal Insecticide, Fungicide, and Rodenticide Act (7 U.S.C. Section 1361 et seq .), and the Occupational Safety and Health Act (19 U.S.C. Section 651 et seq .), as these laws have been amended or supplemented, and any analogous foreign, federal, state or local statutes, and the regulations promulgated pursuant thereto.
CONFIDENTIAL
(g) Environmental Loss shall mean any loss, cost, damage, liability, deficiency, fine, penalty or expense (including, without limitation, reasonable attorneys fees, engineering and other professional or expert fees), investigation, removal, cleanup and remedial costs (voluntarily or involuntarily incurred) arising out of or related to any Environmental Claim.
(h) Person shall include any individual, partnership, corporation, trust, unincorporated organization, government or department or agency thereof and any other entity.
Lessee shall fully and promptly pay, perform, discharge, defend, indemnify and hold harmless Lessor and its Affiliates, successors and assigns, directors, officers, employees and agents from and against any Environmental Claim or Environmental Loss.
The provisions of this Schedule shall survive any expiration or termination of the Lease and shall be enforceable by lessor, its successors and assigns.
3. EARLY PURCHASE OPTION:
(a) Provided that the Lease has not been earlier terminated and provided further that Lessee is not in default under the Lease or any other agreement between Lessor and Lessee, Lessee may, UPON AT LEAST 30 DAYS BUT NO MORE THAN 180 DAYS PRIOR WRITTEN NOTICE TO LESSOR OF LESSEES IRREVOCABLE ELECTION TO EXERCISE SUCH OPTION, purchase on an AS IS BASIS all (but not less than all) of the Equipment listed and described in this Schedule on the Rent Payment Date (the Early Purchase Date) which is sixty (60) months from the Basic Term Commencement Date for a price equal to Thirty Five and 943357/100 percent (35.943357%) of the Capitalized Lessors Cost (the FMV Early Option Price), plus all applicable sales taxes.
Lessor and Lessee agree that the FMV Early Option Price is a reasonable prediction of the Fair Market Value (as such term is defined in the END OF LEASE PURCHASE OPTION Section subsection (b) of the Lease hereof) of the Equipment at the time the option is exercisable. Lessor and Lessee agree that if Lessee makes any non-severable improvement to the Equipment which increases the value of the Equipment and is not required or permitted by the MAINTENANCE Section or the RETURN OF EQUIPMENT Section of the Lease prior to lease expiration, then at the time of such option being exercised, Lessor and Lessee shall increase the purchase price to reflect any addition to the price anticipated to result from such improvement. (The purchase option granted by this subsection shall be referred to herein as the Early Purchase Option.)
(b) If Lessee exercises its Early Purchase Option with respect to the Equipment leased hereunder, then on the Early Purchase Option Date, Lessee shall pay to Lessor any Rent and other sums due and unpaid on the Early Purchase Option Date and Lessee shall pay the FMV Early Option Price, plus all applicable sales taxes, to Lessor in cash.
Except as expressly modified hereby, all terms and provisions of the Agreement shall remain in full force and effect. This Schedule is not binding or effective with respect to the Agreement or Equipment until executed on behalf of Lessor and Lessee by authorized representatives of Lessor and Lessee, respectively.
BALANCE OF PAGE LEFT INTENTIONALLY BLANK
CONFIDENTIAL
IN WITNESS WHEREOF, Lessee and Lessor have caused this Schedule to be executed by their duly authorized representatives as of the date first above written.
LESSOR: | LESSEE: | |||||||
General Electric Capital Corporation | Semiconductor Components Industries, LLC | |||||||
By: | /s/ JAMES C. SHELLEY | By: | /s/ DONALD A. COLVIN | |||||
Name: | James C. Shelley | Name: | Donald A. Colvin | |||||
Title: | Chief Risk Officer | Title: | Executive Vice President and Chief Financial Officer |
ANNEX A
TO SCHEDULE NO. 001
TO MASTER LEASE AGREEMENT
DATED NOVEMBER 7, 2006
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Item Number | ON-SEMI ID # | TOOL ID | Vendor | Model | Vintage | S/N | Description | Description | Capitalized Lessors | |||||||||
1 | 93042300 | CED14601 | AMAT | Ultima | 2000 | 000063 or CB63 | CVD System | 2 HDP Silane, 2 SiN DCVD, STI SiO2, and LI SiN | $1,000,000 | |||||||||
2 | 93042100 | CED14602 | AMAT | Ultima | 2000 | 321453 | CVD System | 2 HDP Silane, 2 SiN DCVD, STI SiO2, and LI SiN | $1,000,000 | |||||||||
3 | 93041900 | CED15601 | AMAT | Ultima | 2000 | 319216 | CVD System | PSG HDP Only 1 chamber plumbed, 2nd chamber coming. Multi slot cool down chamber. Will be a 3 chamber system. Ultima Chambers. 3. Will be brought up. One orienter / aligner | $950,000 | |||||||||
4 | 93039100 | CED19601 | AMAT | Producer | 2000 | 300420 | CVD System | Running Trimethyl Silane, No TEOS, Twin Chambers, 2 Duals, with ASTEC Genertors. Not a Stubby Platform, running Black Diamond. | $750,000 | |||||||||
5 | 93038700 | CED19602 | AMAT | Producer S | 2000 | 408857 | CVD System | Stubby Platform, N2, O2 HeNF3, - ASTEC Generators on Chambers, 2ea, dual twin chambers, MethylSilane for Black Diamond. | $850,000 | |||||||||
6 | 93032600 | MET01604 | AMAT | Endura 5500 | 2000 | 302538 | PVD System | 1 Degas; 1 Reactive PC; SIP Ta; Al; SIP Cu | $1,050,000 | |||||||||
7 | 93032500 | MET01605 | AMAT | Endura 5500 | 1997 | P150F / 302536 | PVD System | 1 Degas; 1 Reactive PC; Encore Ta; Dura Ta; Al; Encore Cu | $950,000 | |||||||||
8 | 93031700 | MET16603 | AMAT | Endura 5500 | 1998 | 820 | PVD System | 2 OD, 2PCII, 3 wb PVD, 1-Ti, 1-Co, 1-TiN | $950,000 | |||||||||
9 | 93031600 | MET16604 | AMAT | Endura 5500 | 1998 | 778 | PVD System | 2 OD, 2PCII, 4 wb PVD, 1-Ti, 1-Co, 1-TiN, 1-Ni | $950,000 | |||||||||
10 | 93036800 | MET17601 | AMAT | Endura 5500 | 2000 | 302536 | PVD System | ChD = Vectra IMP Ti, C4 PVD Ti, Ch2 = Al, Ch1 = PVDTi wb, ChA = OD, Ch3 = Empty | $1,050,000 | |||||||||
11 | 93036600 | MET17602 | AMAT | Endura 5500 | 1999 | P776 | PVD System | ChC = PVD IMP Vectra Ti, Ch1 & 4 PVD Ti, Ch2 is Hot Al with cryo pos extendor for 400C Al, Ch3 is PVD Al water cooled , ChD = PVD Ti wb (all Al Chucks are ESC) | $1,100,000 | |||||||||
12 | 93036400 | MET17603 | AMAT | Endura 5500 | n/a | P079 | PVD System | HP+ Robots, ChD=PVD wb Ti, PVD Ti, Ch1&2 PVD TiN, Ch2&3 PVD Al | $1,050,000 | |||||||||
13 | 93036900 | MET17606 | AMAT | Endura 5500 | n/a | 305624 | PVD System | HP+ Robots, ChD=PVD WB, PVD Ti, Ch1&2 PVD TiN, Ch2&3 PVD Al, PC2 | $1,100,000 | |||||||||
14 | 93036700 | MET17607 | AMAT | Endura 5500 | n/a | 319278 | PVD System | HP+ Robots, ChD=PVD wb Ti, PVD Ti, Ch1&2 PVD TiN, Ch2&3 PVD Al | $1,100,000 | |||||||||
15 | 93036500 | MET17608 | AMAT | Endura 5500 | n/a | 321529 | PVD System | HP+ Robots, ChD=PVD wb Ti, PVD Ti, Ch1&2 PVD TiN, Ch2&3 PVD Al | $1,100,000 | |||||||||
16 | 93037100 | MET17609 | AMAT | Endura 5500 | n/a | 320752 | PVD System | HP+ Robots, ChD=PVD wb Ti, PVD Ti, Ch1&2 PVD TiN, Ch2&3 PVD Al | $1,100,000 | |||||||||
17 | 93037000 | MET17610 | AMAT | Endura 5500 | n/a | 320783 | PVD System | HP+ Robots, ChD=PVD wb Ti, PVD Ti, Ch1&2 PVD TiN, Ch2&3 PVD Al | $1,100,000 | |||||||||
18 | 93043100 | MET19604 | AMAT | Endura 5500 | 2001 | 321530 | PVD System | 2 PCII, 2 OD, Ch1= Vectra IMP Ti wb, Ch2&3 = TxZ, Pos 4 Empty, HP+ Robots | $1,100,000 | |||||||||
19 | 93043500 | MET19605 | AMAT | Endura 5500 | 2000 | 320751 | PVD System | 2 PCII, 2 OD, Ch1= Vectra IMP Ti wb, Ch2&3 = TxZ, Pos 4 Empty, HP+ Robots | $1,100,000 | |||||||||
20 | 93000800 | MET19606 | AMAT | Endura 5500 | n/a | 321765 | PVD System | 2 PCII, 2 OD, Ch1= Vectra IMP Ti wb, Ch2&3 = TxZ, Pos 4 has Inficon insitu Particle monitor, HP+ Robots | $1,100,000 | |||||||||
21 | 93033400 | POL07601 | AMAT | Mirra-Mesa | n/a | 307340 | CMP System | $800,000 | ||||||||||
22 | 93032000 | POL07603 | AMAT | Mirra-Mesa | n/a | 402259 | CMP System | $800,000 | ||||||||||
23 | 93012400 | RTP05601 | AMAT | Centura RTP XE+ | n/a | R561 | RTP System | TPCC Platform, 2 XE+ Chambers, Toxic, 2 cool down stations | $600,000 | |||||||||
24 | 93012600 | RTP05602 | AMAT | Centura RTP XE+ | n/a | 000636 | RTP System | TPCC Platform, 3 XE+ Chambers, Toxic, 2 cool down stations | $650,000 | |||||||||
25 | 93012500 | RTP05603 | AMAT | Centura RTP XE+ | n/a | 317259 | RTP System | TPCC Platform, 3 XE+ Chambers, Toxic, 2 cool down stations | $650,000 | |||||||||
26 | 93003100 | STP18606 | ASML | Converted to 750 | 03-2000 | 5266 | Deep UV Scanner | Converted to 750 in 2005 | $3,500,000 | |||||||||
27 | 93004000 | STP18601 | ASML | 700C | 12-1999 | 8592 | Deep UV Scanner | $3,100,000 | ||||||||||
28 | 93004200 | STP18605 | ASML | 700C | 04-2000 | 8912 | Deep UV Scanner | $3,100,000 | ||||||||||
29 | 93003800 | STP19603 | ASML | 400C | 02-2001 | 7272 | I-Line Scanner | $1,250,000 | ||||||||||
30 | 93001200 | STP19604 | ASML | 400C | 04-2001 | 8114 | I-Line Scanner | $1,250,000 | ||||||||||
31 | 93001000 | STP19605 | ASML | 400C | 05-2001 | 7527 | I-Line Scanner | $1,250,000 | ||||||||||
32 | 93000801 | STP19606 | ASML | 400C | 05-2001 | 7788 | I-Line Scanner | $1,250,000 | ||||||||||
33 | 93007400 | STP19607 | ASML | 400C | 07-2001 | 3848 | I-Line Scanner | $1,250,000 | ||||||||||
34 | 93007200 | STP19608 | ASML | 400C | 06-2001 | 9588 | I-Line Scanner | $1,250,000 | ||||||||||
35 | 93016000 to 93016400 | ETH21600 | LRC | Alliance A6 9400 PTX | 2000 | 8980 TM 94-850, 94-849, 94-848, 94-260 | Poly Etcher | $900,000 | ||||||||||
36 | 93014500 to 93014900 | ETH21602 | LRC | Alliance A6 9400 PTX | 1999 | 8807 TM 94-659, 94-658, 45XL-53, 45XL-229 | Poly Etcher | 2x 9400, 2x 4520 XL | $650,000 | |||||||||
37 | 93017700 to 93018000 | ETH21605 | LRC | Alliance A6 4520XL | 1998 | 8619 TM 45XL-195, 45XL-89, 45XL-92 | Dielectric Etcher | 45XL-195 HPT upgrade | $575,000 | |||||||||
38 | 93019800 to 93020200 | ETH21607 | LRC | Alliance A6 Exelan | 1999 | 8799 TM EX 021, EX 011, EX 051, 45XL-194 | Dielectric Etcher | $575,000 | ||||||||||
39 | 93019100 to 93019500 | ETH21608 | LRC | Alliance A6 Exelan | 1999 | 8804 TM EX 18, EX 052, EX 027, EX028 | Dielectric Etcher | $575,000 | ||||||||||
40 | 93020600 to 93021000 | ETH21609 | LRC | Alliance A6 Exelan | 2000 | 8978 TM EX 047, EX 26, EX 304, EX 263 | Dielectric Etcher | EX 304 HPT upgrade | $575,000 | |||||||||
41 | 93023900 to 93024300 | ETH21612 | LRC | Alliance A6 9600 PTX | 1999 | 8669 TM strip 128, 96-149, 96-159, strip 139 | Metal Etcher | 2x2 Config / Microwave strippers | $750,000 | |||||||||
42 | 93024900 to 93025300 | ETH21613 | LRC | Alliance A6 9600 PTX | 1999 | 8857 TM strip 232, 96-240, 96-249, strip 223 | Metal Etcher | 2x2 Config / Microwave strippers | $750,000 | |||||||||
43 | 93024400 to 93024800 | ETH21614 | LRC | Alliance A6 9600 PTX | 2000 | 80047 TM strip 339, 96-359, 96-358, strip 338 | Metal Etcher | 2x2 Config / Microwave strippers | $750,000 | |||||||||
44 | 93025400 to 93025800 | ETH21615 | LRC | Alliance A6 9600 PTX | 2000 | 80304 TM strip 445, 96-465, 96-466, strip 446 | Metal Etcher | 2x2 Config / Microwave strippers | $750,000 | |||||||||
45 | 93023400 to 93023800 | ETH21616 | LRC | Alliance A6 9600 PTX | 2001 | 80408 TM strip 515, 96-533, 96-532, strip 514 | Metal Etcher | 2x2 Config / Microwave strippers | $750,000 | |||||||||
46 | 93022400 to 93022800 | ETH21617 | LRC | Alliance A6 9600 PTX | 2001 | 80463 TM strip 533, 96-549, 96-548, strip 532 | Metal Etcher | 2x2 Config / Microwave strippers | $750,000 | |||||||||
47 | 93029100 to 93029500 | ETH21631 | LRC | Alliance A6 9400 DFM/PTX | 2001 | 80445 TM 94-1229, 94-1228, 94-1230, 94-1045 | Poly Etcher | 2x DFM, 2x PTX | $900,000 | |||||||||
48 | 93027300 to 93027700 | ETH21651 | LRC | Alliance A6 Exelan | 2001 | 80415 TM EX305, EX 053, EX303, EX 302 | Dielectric Etcher | 2x Exelan, 2x HPT | $575,000 | |||||||||
49 | 93030500 | CED07601 | Novellus | C2 Single Sequel | 2000 | 00-10-C25853 | CVD System | C2 Single Sequel Express, silane only | $550,000 | |||||||||
50 | 93042000 | CED07603 | Novellus | C2 Single Sequel | 2000 | 00-51-C26182 | CVD System | Single Sequel Silane only SiN-Shrink | $550,000 | |||||||||
51 | 93037700 | CED08603 | Novellus | C2 Dual Sequel | 2000 | 00-40-26083 | CVD System | C2 Dual Sequel TEOS Duraflow both Chambers. Undoped TEOS/ Silane SiN | $725,000 | |||||||||
52 | 93037500 | CED08604 | Novellus | C2 Dual Sequel | 2000 | 00-52-C26194 | CVD System | C2 Dual Sequel TEOS Duraflow both Chambers. Undoped TEOS/ Silane SiN, one Module is plumbed to run CO2 | $725,000 | |||||||||
53 | 93028200 | CED09602 | Novellus | C2 Dual Speed/ Sequel | 1998 | 98-34-C25566 | CVD System | C2 Shrink, Dual Speed Sequel, no TEOS | $825,000 | |||||||||
54 | 93041500 | CED09603 | Novellus | C2 Dual Speed/ Sequel | 1999 | 99-31-C25702 | CVD System | Dual SPEED Sequel Shrink, Silane only - Auto Temp Control, Plumbed sith SiF4 for FSG | $825,000 | |||||||||
55 | 93026900 | CED09605 | Novellus | C2 Dual Speed/ Sequel | 2000 | 00-39-C26070 | CVD System | Dual Speed NanoFill (large Turbos), Silane Sequel | $1,100,000 | |||||||||
56 | 93041300 | CED09606 | Novellus | C2 Dual Speed/ Sequel | 2000 | 00-49-C26153 | CVD System | Dual SPEED Sequel Shrink, Silane only - Auto Temp Control, Plumbed sith SiF4 for FSG | $900,000 | |||||||||
57 | 93041400 | CED09607 | Novellus | C2 Dual Speed/ Sequel | 2000 | 00-51-C26183 | CVD System | Dual SPEED Sequel Shrink, Silane only - Auto Temp Control, Plumbed sith SiF4 for FSG | $900,000 | |||||||||
58 | 93041600 | CED09608 | Novellus | C2 Dual Speed/ Sequel | 2000 | 00-52-C26193 | CVD System | Dual SPEED Sequel Shrink, Silane only - Auto Temp Control, No FSG | $900,000 | |||||||||
59 | 93043000 | CED11601 | Novellus | C2 Dual Altus | 1997 | 97-24-5331 | CVD System | Dual Altus W CVD . Running with exclusion ring config | $700,000 | |||||||||
60 | 93043900 | CED11602 | Novellus | C2 Dual Altus | 1997 | 97-38-5387 | CVD System | Dual Altus W CVD . Running with exclusion ring config | $700,000 | |||||||||
61 | 93030600 | CED11604 | Novellus | C2 Dual Altus | 2000 | 00-13-25875 | CVD System | Dual Altus - Shrink | $750,000 | |||||||||
62 | 93027800 | ETH25601 | TEL | Unity M | n/a | UM 0029 | Dielectric Etcher | 3x DRM | $1,400,000 | |||||||||
63 | 93029000 | ETH36601 | TEL | Unity Me | 2003 | UME 104 | Dielectric Etcher | 1x SCCM, 1 DRM | $800,000 | |||||||||
64 | 93028900 | ETH36602 | TEL | Unity Me | 2004 | UME 116 | Dielectric Etcher | 2x DRM | $1,050,000 | |||||||||
65 | 93003900 | TRK04601 | TEL | Act 8 | 03-2000 | 9200963 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $575,000 | |||||||||
66 | 93004100 | TRK04605 | TEL | Act 8 | 05-2000 | 9201118 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $575,000 | |||||||||
67 | 93003000 | TRK04606 | TEL | Act 8 | 03-2000 | 9200964 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $575,000 | |||||||||
68 | 93003700 | TRK05603 | TEL | Act 8 | 03-2001 | 9212143 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $650,000 | |||||||||
69 | 93001303 | TRK05604 | TEL | Act 8 | 04-2001 | 9212211 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $650,000 | |||||||||
70 | 93001100 | TRK05605 | TEL | Act 8 | 05-2001 | 9212212 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $650,000 | |||||||||
71 | 93000900 | TRK05606 | TEL | Act 8 | 06-2001 | 9212213 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $650,000 | |||||||||
72 | 93007300 | TRK05607 | TEL | Act 8 | 08-2001 | 9212296 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $650,000 | |||||||||
73 | 93007100 | TRK05608 | TEL | Act 8 | 08-2001 | 9212290 | Coater/Developer Track | 2C / 2B / 4D / RDS Pumps / WEE/SMIF | $650,000 | |||||||||
TOTAL CAPITALIZED LESSORS COST | $70,000,000 |