ENTEGRIS INC Bonus & Incentive Agreements

Form of Entegris, Inc. Performance-Based RSU Award Agreement (2024+) (Filed With SEC on February 15, 2024)

Entegris, Inc 2023 Performance Share Award Agreement (Filed With SEC on February 23, 2023)

Entegris, Inc. 2022 Performance Share Award Agreement (Filed With SEC on February 4, 2022)

Entegris, Inc. 2021 Performance Share Award Agreement (Filed With SEC on February 5, 2021)

Entegris, Inc. 2020 Performance Share Award Agreement (Filed With SEC on April 21, 2020)

Entegris, Inc. 2019 Performance Share Award Agreement (Filed With SEC on February 7, 2020)

Entegris, Inc. 2018 Performance Share Award Agreement (Filed With SEC on February 11, 2019)

Entegris, Inc. 2017 Performance Share Award Agreement (Filed With SEC on February 15, 2018)

ENTEGRIS, INC. SECOND AMENDED AND RESTATED ENTEGRIS INCENTIVE PLAN Article 1. Purpose (Filed With SEC on May 24, 2017)

ENTEGRIS, INC. 2016 Performance Share Award Agreement (Filed With SEC on February 17, 2017)

ENTEGRIS, INC. 2015 Performance Share Award Agreement (Filed With SEC on February 29, 2016)

ENTEGRIS, INC. 2014 Performance Award Agreement (Filed With SEC on October 31, 2014)

ENTEGRIS, INC. 2008 Equity Incentive Award Agreement (Filed With SEC on March 2, 2009)

AMENDMENT NUMBER THREE TO ENTEGRIS, INC. 1999 LONG TERM INCENTIVE ANDSTOCK OPTION PLAN (Filed With SEC on August 7, 2008)

AMENDMENT NUMBER TWO TO ENTEGRIS, INC. 2001 EQUITY INCENTIVE PLAN (Filed With SEC on August 7, 2008)

ENTEGRIS, INC. AMENDED ANDRESTATED ENTEGRIS INCENTIVE PLAN (Filed With SEC on August 7, 2008)

ENTEGRIS, INC. 2007 Equity Incentive Award Agreement (Filed With SEC on March 3, 2008)

ENTEGRIS, INC. 2006 Equity Incentive Award Agreement (Filed With SEC on May 11, 2006)

ENTEGRIS, INC. 1999 LONG-TERM INCENTIVE AND STOCK OPTION PLAN (Filed With SEC on April 7, 2005)