Axcelis Tech Inc Business Finance Contracts & Agreements

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Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended and Restated May 7, 2025)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2025
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2022
First Amendment to Amended and Restated Revolving Credit and Term Loan and Security Agreement by and among Axcelis Technologies, Inc., Silicon Valley Bank, and Lenders
Credit Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2021
Axcelis Technologies, Inc. Description of Common Stock Registered under Section 12 of the Exchange Act
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2020
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended February 5, 2019)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2019
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2018
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended through May 16, 2017)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
Axcelis Technologies, Inc. 2012 Equity Incentive Plan (as Amended)
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2017
Axcelis Technologies, Inc. 2012 Equity Incentive Plan
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2016
Axcelis Technologies, Inc. 2012 Equity Incentive Plan
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Second Amendment to Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc.
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2015
Axcelis Technologies, Inc. 2000 Stock Plan (as Amended)
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2015
Waiver and First Amendment to Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc.
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2014
Amendment to Business Loan Agreement between Axcelis Technologies, Inc. and Northern Bank & Trust Company (August 2014)
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
Real Estate Sale Agreement between Axcelis Technologies, Inc. and Middleton Beverly Investors LLC (October 3, 2014)
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
Amendment and Waiver to Business Loan Agreement between Axcelis Technologies, Inc. and Northern Bank & Trust Company (May 2, 2014)
Waiver Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2014
Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc.
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
Business Loan Agreement between Axcelis Technologies, Inc. and Northern Bank & Trust Company dated July 5, 2013
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2013
Asset Purchase Agreement between Lam Research Corporation and Axcelis Technologies, Inc.
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2012
Third Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Axcelis Technologies, Inc. Restricted Stock Unit Award Agreement under 2012 Equity Incentive Plan
Equity Distribution Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2012
Second Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
First Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Second Amended and Restated Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2011
First Loan Modification Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2010
Export-Import Bank Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2010
Amended and Restated Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2010
Modification Agreement for CEO Compensation between Axcelis Technologies, Inc. and Mary G. Puma
Modification Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
Forbearance Agreement between U.S. Bank National Association and Axcelis Technologies, Inc. regarding 4.25% Convertible Senior Subordinated Notes
Forbearance Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2009
Share Purchase Agreement among Sumitomo Heavy Industries, Ltd., Axcelis Technologies, Inc., and SEN Corporation (February 26, 2009)
Purchase Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2009
Loan and Security Agreement between Silicon Valley Bank and Axcelis Technologies, Inc. and Axcelis Technologies CCS Corporation
Loan Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2008
Registration Rights Agreement between Axcelis Technologies, Inc. and Quantum Partners LDC (May 2, 2006)
Registration Rights Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
NY
2006
Indenture for 4.25% Convertible Senior Subordinated Notes Due 2009 between Axcelis Technologies, Inc. and U.S. Bank National Association
Indenture Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
MA
2006
Axcelis Technologies Executive Officer Stock Option Vesting Acceleration and Lock-Up Agreement
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Axcelis Technologies, Inc. Restricted Stock Agreement under 2000 Stock Plan with [Recipient Name]
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2005
Axcelis Technologies, Inc. Restricted Stock Unit Award Agreement under 2000 Stock Plan
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies, Inc. 2000 Stock Plan (as Amended)
Stock Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
DE
2005
Axcelis Technologies, Inc. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate for Non-Employee Directors
Warrant Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012
Axcelis Technologies, Inc. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate (Employee Grant)
Warrant Agreements
Axcelis Tech Inc
Semiconductors & Semiconductor Equipment
2012